Article
type: Class

Document
type: Class

Anualidad
type: Class

Academic Article
type: Class

1995
type: Class

Information Content Entity
type: Class

Continuant
type: Class

Entity
type: Class

Generically Dependent Continuant
type: Class

RDF description of Structural analysis of thermally oxidized amorphous SiGe layers - http://research.umh.es/vivo/pub/articulo/89108
type: Document
rights: termsOfUse
date: 2026-08-12T19:27:44
publisher: Structural analysis of thermally oxidized amorphous SiGe layers

Structural analysis of thermally oxidized amorphous SiGe layers
type: Entity
related by: AutorExt:143320_1995-Artículo:89108
has publication venue: MICROELECTRONIC ENGINEERING
page start: 225
type: Generically Dependent Continuant
type: Continuant
type: Article
related by: AutorExt:143319_1995-Artículo:89108
most specific type: 1995
type: Information Content Entity
ARG_2000028: 89108 vcard
type: Academic Article
type: 1995
type: Document
related by: Autor:120787-Artículo:89108
most specific type: Academic Article
type: Anualidad
date time value: 89108 pubdate
related by: AutorExt:143323_1995-Artículo:89108
type: Thing
related by: AutorExt:143322_1995-Artículo:89108
related by: AutorExt:143321_1995-Artículo:89108
page end: 228

AutorExt:143320_1995-Artículo:89108
type: Relationship
type: BFO_0000020
type: Entity
type: Thing
type: Authorship
type: Continuant
relates: Structural analysis of thermally oxidized amorphous SiGe layers

MICROELECTRONIC ENGINEERING
type: Entity
publication venue for: Structural analysis of thermally oxidized amorphous SiGe layers
type: Information Content Entity
type: Journal
type: Periodical
type: Thing
type: Generically Dependent Continuant
type: Collection
type: Continuant

AutorExt:143319_1995-Artículo:89108
type: Relationship
type: BFO_0000020
type: Entity
type: Thing
type: Authorship
type: Continuant
relates: Structural analysis of thermally oxidized amorphous SiGe layers

Autor:120787-Artículo:89108
type: Relationship
type: BFO_0000020
type: Entity
type: Thing
type: Authorship
type: Continuant
relates: Structural analysis of thermally oxidized amorphous SiGe layers

AutorExt:143323_1995-Artículo:89108
type: Relationship
type: BFO_0000020
type: Entity
type: Thing
type: Authorship
type: Continuant
relates: Structural analysis of thermally oxidized amorphous SiGe layers

AutorExt:143322_1995-Artículo:89108
type: Relationship
type: BFO_0000020
type: Entity
type: Thing
type: Authorship
type: Continuant
relates: Structural analysis of thermally oxidized amorphous SiGe layers

AutorExt:143321_1995-Artículo:89108
type: Relationship
type: BFO_0000020
type: Entity
type: Thing
type: Authorship
type: Continuant
relates: Structural analysis of thermally oxidized amorphous SiGe layers